SEM/EDX analysis as a combined method for electron-optical counting and measurement of particles in the scanning electron microscope (SEM) and element analysis by means of energy-dissolved X-ray spectroscopy (EDX) can provide additional information about the damage potential or origin of inorganic particles. The elemental analysis results in the EDX spectra, from which the chemical elements or alloy composition of the particles are obtained, as essential information. The result is shown in size classes according to material and hardness classes. CleanControlling offers different methods of SEM/EDX analysis for the targeted and economic solution of customer's requirements: 

• SEM/EDX analysis of individual particles that exceed the limit values, if a clear classification according to the light-optical analysis in metallic shiny / non-shiny is not possible
• SEM/EDX scan of the analysis filter for counting, measuring and material classification when individual particle materials are regulated, such as abrasive or ceramic particles that cannot be identified by light-optical analysis. An economical method is the scan over a defined period of 1 - 2 h, the result is then extrapolated to the full filter surface. The economic execution of a complete scan of the analysis filter depends on the filter occupancy and thus on the particle contamination of the component.
• The correlative SEM/EDX analysis in combination with the light-optical analysis enables the targeted element analysis of the relevant particles identified by the microscopic analysis. The particle coordinates are transferred directly to the SEM/EDX system and can thus be analyzed quickly and economically.